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5225 Pulsed & Steady State AeroBar Digital Ionizer
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Price: From $938.00 to $1,786.00
Product Options
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The AeroBar® Model 5225 is specifically designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, charge can be reduced to comply with E-78 Level 1, the most stringent requirement of semiconductor manufacturers. The Model 5225 is CE-certified, complying with SEMI S-2 specifications.
The Model 5225 is easily integrated with your tool, using either pre-compiled routines or open-source code examples. Tight integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling. System alerts and messages are displayed at the tool controller for easy notification, taking the place of older, line signal notification systems.
Features:
- Six different bar lengths including three EFEM-specific lengths: 22, 28, 44, 64, and 84 inches with 36, 56, and 76" EFEM lengths
- Integrated software package
- All parameters are settable
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Price: From $895.00 to $959.00
The Digital Ceiling Emitter Model 5511 provides uniform ionization throughout the open areas of a clean room. Powered by the Model 5580 or 5520 controllers with digital technology.
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Price: From $445.00 to $1,288.00
Model 5685 steady-state DC AeroBar® is excellent for close proximity applications.
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Price: From $1,092.00 to $1,839.00
The In-line Gas Ionizer Model 4210 pipes compressed ionized gas for balanced charge neutralization in the heart of process equipment, where limited space or proximity to sensitive products makes ionizing bars impractical.
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Price: From $838.00 to $965.00
The QuadBar Ionizer Model 4630/4632 provides safe, effective static charge control in the ambient air inside a process chamber.
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